Purdue School of Engineering and Technology

Purdue School of Engineering and Technology

Integrated Nanosystems Processes and Devices

ME 52601 / 3 Cr.

This course covers processes and devices associated with integrated nanosystems. Integrated nanosystems refer to systems which consist of integrated micro-, meso-, and/or macro-scale parts, and their core components are realized by nano-scale materials, processes, and devices. The course, while covering processes which result in integrated nanosystems, will focus on the theory and operation of select electronic, electromechanical, and biomedical devices which are used for information technology, sensing, medical, and other applications. The lectures will be complemented by hands-on laboratory experience.


Introduction to Nanoscale Science and Technology, by M. Dir Ventra,  S. Evoy, J.R. Heflin, Springer, ISBN: 978-1-4020-7720-3 Research and Review Papers


Fundamentals of the processes and devices resulting in integrated nanosystems. Hands-on laboratory experience, reinforcing theory learned in class.

  • Introduction to Integrated Nanosystems Processes and Devices – 1 classes
  • Micro/Nanoelectronic Devices;Micro/Nanoelectromechanical Systems (MEMS/NEMS); Micro/Nanoscale Devices for Biomedical Applications
  • Nanoscale Processes and Fabrication Methods – 2 classes
    • Review of Lithography Process; Pattern Transfer by Etching Techniques; Material Deposition Techniques; Review of Electrostatic Self-Assembly; Measurements Techniques: Review of AFM and STM, Four Probe Method, Optical Microscopy
  • Micro/Nanoelectronics Devices: Theory and Implementation – 5 classes
  • Fundamentals of Micro/Nanoelectronics Devices
  • PN Junctions: Equilibrium Conditions; Forward- and Reverse- Biased Junction; Reverse-Bias Breakdown
  • The MOS Field-Effect Transistor: Leakage Characteristics of Gate Dielectrics; Output and Transfer Characteristics; Short Channel MOSFET I-V Characteristics; Subthreshold Characteristics; Substrate Bias, Hot Electron, Short Channel, and Narrow width Effects
  • Nanoelectronics: Device Characteristics; Contact Resistance and Quantized Conductance; Molecular Switches and Transistors; Electronics with DNA; Transport Mechanism and Current-Induced Effects; Integration Strategy and Applications
  • Single Electronics: Single Electron Tunneling (SET); Superconducting SET; Implementation of SET; Applications of SET
  • Micro/Nanoelectromechanical Systems (MEMS/NEMS): Theory and Implementation - 4 classes
  • Mechanics of structures (Modeling Beams, Plates and Membranes); Resonators (Modeling Single and multi degree of freedom systems); Transduction; Near Field Interactions; Dissipation; Nonlinearity of MEMS/NEMS; Noise in MEMS/NEMS; Uncertainty in MEMS/NEMS; Examples and Applications of MEMS/NEMS
  • Micro/Nanoscale Devices for Biomedical Applications: Theory and Implementation    – 3 classes
  • Fluid Mechanics; Fundamentals of Fluidic at Micro/Nanoscale; Integration of Nanofluidic Devices with Bionanosensors; Applications of Nanofluidics and Bionanosensor Devices
Assignments, Exams, and Grading
  • Laboratory Component: Fifteen sessions to introduce students to hands-on laboratory and simulation experience, reinforcing theory learned through lectures. Students are expected to turn-in a project report at the end of the course. (Total lab sessions will count as 1 credit hour for the course). Three classes of devices in integrated nanosystems will be evaluated such as electronics, cantilever beams, and micro/nanofluidics.
  • Research Paper: The important elements sought in the term paper include: a thorough survey of the literature on the subject; an in-depth understanding of the phenomena related to the subject; and an innovative analysis of possible solutions based on your theoretical studies.
  • Exam (1 class): Comprehensive
  • Computer Usage: 15% (Making mask design and running simulations for the devices discussed in the class)
  • Laboratory Project: 35% Design and Characterization of the devices (Electronic, NEMS and Fluidic) using simulation software such as L-EDIT and COVENTOR. In addition, fabricate and characterize the devices using the processes learned. 

ABET Category: 50% Engineering Science and 50% Engineering Design